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Sub-micron feedback stage - List of Manufacturers, Suppliers, Companies and Products

Sub-micron feedback stage Product List

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Submicron Feedback Stage FS-3150X/XY

Submicron Feedback Stage FS-3150X/XY

A positioning stage with a built-in long-stroke encoder, featuring high resolution, high position reproducibility, and high position retention.

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to minimize detection errors. It features a self-developed linear encoder and a proprietary feedback control circuit, providing high resolution, excellent positioning repeatability, and position retention after positioning. The stroke is '150mm' with a resolution of either '50nm' or '100nm' (*1). Due to the long stroke, it can perform both sample movement and precise positioning with just this one unit. (*1) In combination with the feedback stage controller FC-411 or FC-111.

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Submicron Feedback Stage FS-3200X/XY

Submicron Feedback Stage FS-3200X/XY

"Precision positioning device" with high resolution, high positioning repeatability, and excellent position holding capability after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, reducing detection errors. It has a stroke of 200mm with a resolution of either 50nm or 100nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. Equipped with a slowdown sensor, it minimizes the impact during stops at the stroke end. (*1) In combination with the feedback stage controllers FC-414 or FC-114.

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Vacuum-compatible submicron feedback stage, lift type

Vacuum-compatible submicron feedback stage, lift type

Usable in a vacuum! Positioning stage for the Z-axis with built-in linear encoder and sub-micron resolution!

This is a high-resolution Z-axis positioning stage equipped with an optical linear scale. It achieves a stroke of either 5mm or 10mm with a resolution of either 50nm (*1) or 100nm (*2). It has been treated for outgassing and can be used in a vacuum. Thanks to its unique design, it minimizes changes in the tilt of the table surface, which is common in Z-axis configurations, and is equipped with a self-developed linear scale and proprietary feedback control circuit, providing high resolution, excellent positioning repeatability, and position retention after positioning. (*1) Combination with feedback stage controller FC-411 (*2) Combination with feedback stage controller FC-111

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Vacuum-compatible submicron feedback stage, micro-rotation type

Vacuum-compatible submicron feedback stage, micro-rotation type

Usable in a vacuum! Stage for adjusting rotation direction

It is equipped with an optical linear encoder, allowing it to detect the position of the movable parts of the stage, which enables the controller to perform closed-loop control based on that position information, resulting in excellent position reproducibility. The resolution can be operated at "0.00005" or "0.0001" resolution, depending on the controller. It has been treated for outgassing, making it usable in a vacuum.

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Submicron Feedback Stage FS-1020X/XY

Submicron Feedback Stage FS-1020X/XY

Built-in encoder high-resolution and long-stroke positioning stage

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to reduce detection errors. It has a stroke of 20mm with a resolution of either 50nm or 100nm (*1). Thanks to our in-house developed linear encoder and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controllers FC-111 or FC-411.

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Submicron Feedback Stage FS-1040X/XY

Submicron Feedback Stage FS-1040X/XY

Built-in encoder high-resolution positioning stage with high positioning repeatability and excellent position holding after positioning!

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to minimize detection errors. By reading the position with a self-developed encoder and performing feedback control, it excels in resolution, positioning repeatability, and position holding capability. When combined with the feedback stage controller FC-411, it operates with a resolution of '50nm'. When combined with the FC-111, it operates with a resolution of '100nm'. The stroke is '40mm'.

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Submicron Feedback Stage FS-1050X/XY

Submicron Feedback Stage FS-1050X/XY

"Precision positioning device" with high resolution, high positioning reproducibility, and excellent position retention after positioning!

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to reduce detection errors. It has a stroke of 50mm with a resolution of either 50nm or 100nm (*1). Thanks to our in-house developed linear encoder and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controllers FC-411 or FC-111.

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Submicron Feedback Stage FS-1100X/XY

Submicron Feedback Stage FS-1100X/XY

100mm stroke long-stroke and high-resolution positioning stage

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage, reducing detection errors. Since the position is detected by the encoder and feedback control is performed, it excels in resolution, position reproducibility, and position holding capability. When combined with the feedback stage controller FC-411, it operates with a resolution of '50nm', and when combined with FC-111, it operates with a resolution of '100nm', with a stroke range of '100mm'.

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